Brittle fracture and damage in bond pad stacks: Novel approaches for simulation-based risk assessment


We have presented an advanced FEM simulation model that is able to map the scenario of indentation of a diamond tip into a thin brittle SiNx:H film deposited on a Si substrate. Our 2D axisymmetric and 3D quarter and half models are able to reproduce all failure modes observed in preceding indentation experiments. On the one hand, brittle fracture in both… (More)

13 Figures and Tables


  • Presentations referencing similar topics