Breakthrough in high performance inertial navigation grade Sigma-Delta MEMS accelerometer

  title={Breakthrough in high performance inertial navigation grade Sigma-Delta MEMS accelerometer},
  author={Pascal Zwahlen and Yufeng Dong and A-M Nguyen and Felix Rudolf and J-M Stauffer and Ph Ullah and V. Ragot},
  journal={Proceedings of the 2012 IEEE/ION Position, Location and Navigation Symposium},
In this paper, we report a Sigma-Delta MEMS navigation grade accelerometer, which, to our knowledge, is the first reported MEMS accelerometer to reach navigation grade performances. This reported system encompasses a high stability and high shock resistance mechanical MEMS sensor, a 5th-order sigma-delta closed-loop electronic with digital loop filtering and high stability voltage reference. Reported performances for a full scale range of 15g, with shock survivability up to 4000g, are a 10 μg… CONTINUE READING
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