Corpus ID: 102239047

Breakthrough Chemical Analysis of HMDS Reveals a Solution for the Prevention of Lens Hazing

  title={Breakthrough Chemical Analysis of HMDS Reveals a Solution for the Prevention of Lens Hazing},
  author={Kevin J. Seguin and Andrew J. Dallas},
  • Kevin J. Seguin, Andrew J. Dallas
  • Published 2008
  • Chemistry
  • In recent years as the industry has moved from 248 nm lithography tools to higher powered 193 nm tools, a new and costly problem emerged for semiconductor processors: molecular contamination on the optics (lens hazing). Because progress in one area almost always prompts new concerns in another, Donaldson has applied its more than 90 years of filtration expertise to learn more about this problem and discover the breakthrough solution. With so much at stake—costly lens replacement along with lost… CONTINUE READING

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