Bottom-up photonic crystal cavities formed by patterned III-V nanopillars.

Abstract

We report on the formation and optical properties of bottom-up photonic crystal (PC) cavities formed by III-V nanopillars (NPs) via catalyst-free selective-area metal-organic chemical vapor deposition on masked GaAs substrates. This method of NP synthesis allows for precise lithographic control of NP position and diameter enabling simultaneous formation of… (More)
DOI: 10.1021/nl200355d

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