Biocompatible coatings for CMUTs in a harsh, aqueous environment

@article{Zhuang2007BiocompatibleCF,
  title={Biocompatible coatings for CMUTs in a harsh, aqueous environment},
  author={Xuefeng Zhuang and Amin Nikoozadeh and M. Beasley and Goeksenin G. Yaralioglu and B. Khuri-yakub and Beth l. Pruitt},
  journal={Journal of Micromechanics and Microengineering},
  year={2007},
  volume={17},
  pages={994 - 1001}
}
The results of coating capacitive micromachined ultrasonic transducer (CMUT) arrays with two different biocompatible materials, parylene-c and polydimethylsiloxane (PDMS), are reported. These materials were characterized for use with CMUTs to enable direct contact transcutaneous and in vivo imaging. A passivation coating is required to provide electrical isolation to the active areas of the device and to protect it from a corrosive environment. It must also provide good mechanical… 
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41 Citations
Background Citations
17
Methods Citations
10

41 Citations

Investigation of PDMS as coating on CMUTs for imaging

A protective layer is necessary for Capacitive Micromachined Ultrasonic Transducers (CMUTs) to be used for imaging purpose. The layer should both protect the device itself and the patient while…

Investigation of PDMS as coating on CMUTs for Imaging

A protective layer is necessary for Capacitive Micromachined Ultrasonic Transducers (CMUTs) to be used for imaging purpose. The layer should both protect the device itself and the patient while…

Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer

A finite element model (FEM) is introduced that addresses viscoelasticity and will help in the design process for optimizing the static and the dynamic behavior of vis coelastic-polymer-coated CMUTs.

Immersion PMUTs Fabricated with a Low Thermal-Budget Surface Micromachining Process

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Encapsulation of Capacitive Micromachined Ultrasonic Transducers (CMUTs) for the Acoustic Communication between Medical Implants

It could be shown that with silicone as a coupling layer it is possible to operate a CMUT behind the housing of an implant, and the setup is found to be well suited for communication between two transducers over a distance of at least 8 cm.

Acoustic lens for capacitive micromachined ultrasonic transducers

Capacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with traditional piezoelectric transducers in therapeutic ultrasound applications. In this paper we have…

Packaging Methods for Magnetoelectric Transducers Used as Wireless Power Receivers

Magnetoelectric (ME) transducers, composed of piezoelectric and magnetostrictive layers, have recently been demonstrated as a receiver in wireless power transfer (WPT) to miniature implantable…

Solvent Compatibility of Parylene C Film Layer

Parylene C has been preferred in various microfluidic and packaging applications as a chemical barrier; therefore, its durability in chemicals is critical to maintain functionality of the devices. In…

A 1-D Capacitive Micromachined Ultrasonic Transducer Imaging Array Fabricated With a Silicon-Nitride-Based Fusion Process

Capacitive micromachined ultrasonic transducers (CMUTs) are an alternative to the conventional method of generating ultrasound that increases bandwidths, simplifies fabrication, and facilitates the…

Silicone Membranes to Inhibit Water Uptake into Thermoset Polyurethane Shape-Memory Polymer Conductive Composites.

In this study, a silicone membrane was used to inhibit water uptake into a thermoset SMP composite containing conductive filler, which led to a reduction in the rate of recovery of the permanent shape when exposed to water at 37 °C.

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