Biocompatible coatings for CMUTs in a harsh, aqueous environment

  title={Biocompatible coatings for CMUTs in a harsh, aqueous environment},
  author={Xuefeng Zhuang and Amin Nikoozadeh and M. Beasley and Goeksenin G. Yaralioglu and B. Khuri-yakub and Beth l. Pruitt},
  journal={Journal of Micromechanics and Microengineering},
  pages={994 - 1001}
The results of coating capacitive micromachined ultrasonic transducer (CMUT) arrays with two different biocompatible materials, parylene-c and polydimethylsiloxane (PDMS), are reported. These materials were characterized for use with CMUTs to enable direct contact transcutaneous and in vivo imaging. A passivation coating is required to provide electrical isolation to the active areas of the device and to protect it from a corrosive environment. It must also provide good mechanical… 

Investigation of PDMS as coating on CMUTs for imaging

A protective layer is necessary for Capacitive Micromachined Ultrasonic Transducers (CMUTs) to be used for imaging purpose. The layer should both protect the device itself and the patient while

Investigation of PDMS as coating on CMUTs for Imaging

A protective layer is necessary for Capacitive Micromachined Ultrasonic Transducers (CMUTs) to be used for imaging purpose. The layer should both protect the device itself and the patient while

Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer

A finite element model (FEM) is introduced that addresses viscoelasticity and will help in the design process for optimizing the static and the dynamic behavior of vis coelastic-polymer-coated CMUTs.

Immersion PMUTs Fabricated with a Low Thermal-Budget Surface Micromachining Process

This study presents encapsulated piezoelectric micromachined ultrasonic transducers (PMUTs)fabricated by surface micromachining, forming high fill-factor arrays for high transmitting pressure output.

Encapsulation of Capacitive Micromachined Ultrasonic Transducers (CMUTs) for the Acoustic Communication between Medical Implants

It could be shown that with silicone as a coupling layer it is possible to operate a CMUT behind the housing of an implant, and the setup is found to be well suited for communication between two transducers over a distance of at least 8 cm.

Acoustic lens for capacitive micromachined ultrasonic transducers

Capacitive micromachined ultrasonic transducers (CMUTs) have great potential to compete with traditional piezoelectric transducers in therapeutic ultrasound applications. In this paper we have

Packaging Methods for Magnetoelectric Transducers Used as Wireless Power Receivers

Magnetoelectric (ME) transducers, composed of piezoelectric and magnetostrictive layers, have recently been demonstrated as a receiver in wireless power transfer (WPT) to miniature implantable

Solvent Compatibility of Parylene C Film Layer

Parylene C has been preferred in various microfluidic and packaging applications as a chemical barrier; therefore, its durability in chemicals is critical to maintain functionality of the devices. In

A 1-D Capacitive Micromachined Ultrasonic Transducer Imaging Array Fabricated With a Silicon-Nitride-Based Fusion Process

Capacitive micromachined ultrasonic transducers (CMUTs) are an alternative to the conventional method of generating ultrasound that increases bandwidths, simplifies fabrication, and facilitates the

Silicone Membranes to Inhibit Water Uptake into Thermoset Polyurethane Shape-Memory Polymer Conductive Composites.

In this study, a silicone membrane was used to inhibit water uptake into a thermoset SMP composite containing conductive filler, which led to a reduction in the rate of recovery of the permanent shape when exposed to water at 37 °C.

Parylene etching techniques for microfluidics and bioMEMS

  • E. MengY. Tai
  • Engineering
    18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005.
  • 2005
Parylene C (poly(monochloro-p-xylylene)) is a member of a unique family of thermoplastic, crystalline polymers. Compared to other polymers, parylene films are exceptionally conformal and chemically

Robust parylene-to-silicon mechanical anchoring

  • M. LigerD. RodgerY. Tai
  • Engineering
    The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE
  • 2003
This paper describes a new technique for strongly anchoring parylene (poly-para-xylylene) layers on a silicon substrate. Parylene has gained interest for MEMS applications due to its excellent

A surface micromachined electrostatic ultrasonic air transducer

  • M. HallerB. Khuri-Yakub
  • Physics, Engineering
    IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
  • 1996
Airborne ultrasound has many applications such as, ranging, nondestructive evaluation, gas flow measurement, and acoustic microscopy. This paper investigates the generation and detection of

Hemocompatibility of materials used in microelectromechanical systems: platelet adhesion and morphology in vitro.

Data suggests that Si, Si3N4, Si(1.0)N( 1.1), and SU-8 photoresist may be more reactive to platelets and therefore more thrombogenic than parylene, SiO2, and polyurethane, which may be helpful in guiding the selection of materials for use in the development of blood-contacting microelectromechanical systems.

A solution to the charging problems in capacitive micromachined ultrasonic transducers.

Paired tests showed the superior reliability characteristics of the PostCMUT design compared to those of conventional CMUT designs, which constitutes a major contribution to CMUT commercialization.

Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology

Introduces a new method for fabricating capacitive micromachined ultrasonic transducers (CMUTs) that uses a wafer bonding technique. The transducer membrane and cavity are defined on an SOI

Dynamic analysis of capacitive micromachined ultrasonic transducers

The time-domain, finite element calculations for cMUTs using LS-DYNA, a commercially available finite element package, are presented and a good match was observed; the model is useful for designing cM UTs that operate in regimes where membranes make contact with the substrate.

Selective deposition of parylene C for underwater shear-stress sensors

  • Yong XuY. Tai
  • Engineering
    TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
  • 2003
This paper reports the application of selective parylene C deposition for the waterproof coating of underwater shear-stress sensors. The selective deposition has been achieved by electrically heating

Re-configurable fluid circuits by PDMS elastomer micromachining

  • D. ArmaniC. LiuN. Aluru
  • Engineering
    Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291)
  • 1999
We report on a microfabrication technique for realizing re-configurable micro fluidics devices using polymethylsiloxane material (PDMS). The mechanical characteristics of the material, including the