Binary nanopatterned surfaces prepared from silane monolayers

@inproceedings{Pallandre2004BinaryNS,
  title={Binary nanopatterned surfaces prepared from silane monolayers},
  author={Antoine Pallandre and Karine Glinel and and Alain M. Jonas and Bernard Nysten},
  year={2004}
}
We report on the fabrication of planar surfaces bearing nanoscale chemical patterns, obtained by combining electron beam lithography and gas-phase silanation, offering an unprecedented range of chemical functionalities down to the 20−25-nm feature size level. Compared to previously reported methods, this method combines a number of desirable features such as high resolution, a large range of accessible chemical functions, the possibility to pattern large surfaces, and the potential for higher… CONTINUE READING
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Eds.; WileyVCH: Weinheim, Germany, 2003; p 271

G. Decher, J. B. Schlenoff
  • 2003

A.The Science and Engineering of Microelectronic Fabrication

S. Campbell
  • 2001

InThin Films: Polyelectrolyte Multilayers and Related Multicomposites

P. T. Hammond
  • Surf. Sci.2000,
  • 2000

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