Big Data and Predictive Analytics Methods for Modeling and Analysis of Semiconductor Manufacturing Processes

@article{Butte2016BigDA,
  title={Big Data and Predictive Analytics Methods for Modeling and Analysis of Semiconductor Manufacturing Processes},
  author={Sujata Butte and Sainath Patil},
  journal={2016 IEEE Workshop on Microelectronics and Electron Devices (WMED)},
  year={2016},
  pages={1-5}
}
Semiconductor manufacturing fabs generate huge amount of data. The big data approaches of data management have increased speed, quality and accessibility of the data. This paper discusses harnessing value from this data using predictive analytics methods. Various aspects predictive analytics in the context of semiconductor manufacturing are discussed. The limitations of standard methods of analysis and the need to adopt robust methods of modeling and analysis are highlighted. The robust… CONTINUE READING

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References

Publications referenced by this paper.
Showing 1-10 of 29 references

A novel holistic dynamic sampling solution for semiconductor manufacturing processes

VK Butte, A Kalita
Micron - TLP Technical Journal • 2013

Capacitive energy storage in microscale devices : recent advances in design and fabrication of microsupercapacitors

M Beidaghi, Y Gogotsi
Energy & Environmental Science • 2013

Manufacturing Process ControlBased Metrology Dispatching for RuntoRun Controllers

VK Butte, A Prado, A Kalita
Micron - TLP Technical Journal • 2013

Process control based metrology dispatching solution for semiconductor manufacturing processes

VK Butte, A Prado, A Kalita
Micron - TLP Technical Journal • 2013

Process risk based adaptive sampling solution for semiconductor manufacturing processes

VK BUTTE, VK Butte
2013

Understanding big data : Analytics for enterprise class hadoop and streaming data

P Zikopoulos, C. Eaton
2011

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