Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment.

  title={Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment.},
  author={M. Borselli and Thomas J. Johnson and Oskar J. Painter},
  journal={Optics express},
  volume={13 5},
Using a combination of resist reflow to form a highly circular etch mask pattern and a low-damage plasma dry etch, high-quality-factor silicon optical microdisk resonators are fabricated out of silicon-on-insulator (SOI) wafers. Quality factors as high as Q = 5x10(6) are measured in these microresonators, corresponding to a propagation loss coefficient as small as alpha ~ 0.1 dB/cm. The different optical loss mechanisms are identified through a study of the total optical loss, mode coupling… CONTINUE READING
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