Benchtop Polymer MEMS

@article{Delille2006BenchtopPM,
  title={Benchtop Polymer MEMS},
  author={Remi Delille and M. Urdaneta and Susan B. Moseley and Elisabeth Smela},
  journal={Journal of Microelectromechanical Systems},
  year={2006},
  volume={15},
  pages={1108-1120}
}
Loctite photopatternable adhesives 3108, 3340, and 3525 are introduced for microelectromechanical systems (MEMS) applications. These materials are patterned within minutes by exposure to ultraviolet (UV) light followed by rinsing with a solvent; no further processing is required. Because the uncured fluid is relatively insensitive to room light, this can be done on any lab bench without the requirement for a clean room. The materials can be spin-coated to obtain films, or cast between spacers… CONTINUE READING

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