Benchtop Polymer MEMS

  title={Benchtop Polymer MEMS},
  author={Remi Delille and M. Urdaneta and Susan B. Moseley and Elisabeth Smela},
  journal={Journal of Microelectromechanical Systems},
Loctite photopatternable adhesives 3108, 3340, and 3525 are introduced for microelectromechanical systems (MEMS) applications. These materials are patterned within minutes by exposure to ultraviolet (UV) light followed by rinsing with a solvent; no further processing is required. Because the uncured fluid is relatively insensitive to room light, this can be done on any lab bench without the requirement for a clean room. The materials can be spin-coated to obtain films, or cast between spacers… CONTINUE READING


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Fabrication of PDMS stamps for the patterned growth of carbon nanotubes

  • P. Argyrakis, L. Teo, T. Stevenson, R. Cheung
  • Microelectron. Eng., vol. 78–79, pp. 647–652…
  • 2005
1 Excerpt

Microfabrication, microfluidics, and biomedicine: New tools and new opportunities

  • G. M. Whitesides
  • Proc. MicroTAS/9th Intl. Conf. Miniaturized Syst…
  • 2005
1 Excerpt

A rapid prototyping technique for the fabrication of solvent-resistant structures

  • C. Harrison, J. T. Cabral, C. M. Stafford, A. Karim, E. J. Amis
  • J. Micromech. Microeng., vol. 14, no. 1, pp. 153…
  • 2004
1 Excerpt

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