• Materials Science
  • Published 2012

Bellows-type piezoelectrically-hydraulically-actuated microfluidic servo valve and actuating device thereof

@inproceedings{2012BellowstypePM,
  title={Bellows-type piezoelectrically-hydraulically-actuated microfluidic servo valve and actuating device thereof},
  author={李松晶 and 曾文 and 佟志忠 and 刘旭玲},
  year={2012}
}
The invention relates to a bellows-type piezoelectrically-hydraulically-actuated microfluidic servo valve and an actuating device thereof and belongs to the technical field of microfluidic control. The problems of poor sealing reliability and instability in amplification factors of hydraulic amplification by means of matching piezoelectric actuating with a hydraulic amplifier in existing microfluidics are solved. A first accommodating cavity retainer of the servo valve is in the shape of a drum… CONTINUE READING