Beam-supported AlN thin film bulk acoustic resonators

  title={Beam-supported AlN thin film bulk acoustic resonators},
  author={L. A. Callaghan and Vanni Lughi and N. C. MacDonald and D F Clarke},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
A novel, suspended thin film bulk acoustic wave resonator (SFBAR) has been fabricated from an aluminum nitride film sputtered directly on a (100) silicon substrate. The suspended membrane design uses thin beams to support, as well as electrically connect, the resonator and has been fabricated using both thin film processing and bulk silicon micromachining. The quality factor and the effective electromechanical coupling coefficient were characterized as a function of the number and the length of… CONTINUE READING