Batch fabrication of carbon nanotubes at AFM probe tips and AFM imaging

Abstract

We synthesized carbon nanotubes (CNTs) at the tips of commercial atomic force microscope (AFM) probes by chemical vapor deposition (CVD) process with applying an electric field. Applying the electric field during the CVD process increased the yield of AFM probes with CNTs at the tips (CNT-AFM probes). We formed a catalyst layer on the surface of AFM probes… (More)

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Cite this paper

@article{Takagahara2008BatchFO, title={Batch fabrication of carbon nanotubes at AFM probe tips and AFM imaging}, author={K. Takagahara and Yusuke Takei and Eiji Iwase and K. Matsumoto and Isao Shimoyama}, journal={2008 IEEE 21st International Conference on Micro Electro Mechanical Systems}, year={2008}, pages={713-716} }