Batch-Processed Vacuum-Sealed Capacitive Pressure Sensors

This paper reports two multitransducer vacuumsealed capacitive barometric pressure sensors, one using singlelead and the other using multiple-leads to transfer the electrical signal out of the vacuum-sealed reference cavity. The first device operates with a resolution of 37 mtorr over a pressure range from 600 to 800 torr. The sensitivity is 27 fF/torr… CONTINUE READING

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