Barrier layer mechanism engineering in calcium copper titanate thin film capacitors through microstructure control

@inproceedings{Paisley2008BarrierLM,
  title={Barrier layer mechanism engineering in calcium copper titanate thin film capacitors through microstructure control},
  author={Elizabeth A. Paisley and Mark D Losego and Seymen Ayg{\"u}n and Hughes Spalding Craft and J. Maria},
  year={2008}
}
A peak permittivity greater than 10 000 has been achieved for calcium copper titanate (CCT) thin films by engineering a thin film microstructure that maximizes space charge contributions to polarizability. This permittivity is an order of magnitude greater than previous polycrystalline thin film efforts. This unique microstructure control is accomplished using a chemical solution deposition process flow that produces highly dense parallel layers ∼100 nm in thickness. We observe a thickness… CONTINUE READING