Back to the Programme A MUSICAL INSTRUMENT IN MEMS

@inproceedings{Engelen2010BackTT,
  title={Back to the Programme A MUSICAL INSTRUMENT IN MEMS},
  author={J. B. C. Engelen and Hans de Boer and Jethro G. Beekman and Auke J. Been and Gerrit Adriaan Folkertsma and L. C. Fortgens and Daan de Graaf and S. Vocke and L{\'e}on A. Woldering and Leon Abelmann and Miko Elwenspoek},
  year={2010}
}
In this work we describe a MEMS instrument that resonates at audible frequencies, and with which music can be made. The sounds are generated by mechanical resonators and capacitive displacement sensors. Damping by air scales unfavourably for generating audible frequencies with small devices. Therefore a vacuum of 1.5 mbar is used to increase the quality factor and consequently the duration of the sounds to around 0.25 s. The instrument will be demonstrated during the MME 2010 conference opening… CONTINUE READING