• Physics
  • Published 2019

Autonomous Atomic Scale Manufacturing Through Machine Learning

  title={Autonomous Atomic Scale Manufacturing Through Machine Learning},
  author={Mohammad Rashidi and Jeremiah Croshaw and Kieran Mastel and Marcus Tamura and Hedieh Hosseinzadeh and Robert A. Wolkow},
As the development of atom scale devices transitions from novel, proof-of-concept demonstrations to state-of-the-art commercial applications, automated assembly of such devices must be implemented. Here we present an automation method for the atomic fabrication process using deep learning. We trained a convolutional neural network to identify and locate surface features in scanning tunneling microscope images of the technologically relevant hydrogen-terminated silicon surface. Once the… CONTINUE READING

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