Automatic Tool Changer for SPMs

  title={Automatic Tool Changer for SPMs},
  author={Matthias Neitzel and Ulrich Schmucker and M. Zubtsov},
  journal={2008 8th IEEE Conference on Nanotechnology},
Our research encompasses improvements in SPM instrumentation needed for rapid automated change of nano- working tools like cantilever chips or grippers in the immediate region of SEM or FIB field of view. The major challenges are utmost precision working-tool positioning, repeatable clamping of the tool and placing the working-part in the same point after… CONTINUE READING