Automatic Detection of Laser Damage Threshold by Scattering Light Technique

Abstract

A damage detection and assessment system based on laser-induced changes in surface scattering is reported. It is integrated with a 1064nm, 532nm, 355nm damage test facility used for routine testing of production optics. HfO<sub>2</sub>/SiO<sub>2</sub> HR-coating and HfO <sub>2</sub>/SiO<sub>2</sub> AR-coating were tested by this system, and compared with plasma spark method and Nomarski phase contrast microscope method. The results show He-Ne scattering technique is an effective, reliable technique. Plasma spark intensity varies with different film material and plate fashion, and Nomarski phase contrast microscope observation method is an international standard detection method, but it can't detect some damages and is difficult to detect on line

5 Figures and Tables

Cite this paper

@article{Liu2006AutomaticDO, title={Automatic Detection of Laser Damage Threshold by Scattering Light Technique}, author={Anping Liu and Lihua Duan and Jianping Hu and Ming Y. Tang}, journal={2006 6th World Congress on Intelligent Control and Automation}, year={2006}, volume={2}, pages={5318-5321} }