The simulation-based layout planning of automated material handling systems (AMHS) for microelectronics and semiconductor manufacturing demands adequate simulation models. An approach for measuring and quantifying the AMHS layout performance of alternative planning variants is required. Fraunhofer IPA has developed simulation methods and a three level approach for calculation of AMHS performance metrics. This approach is very efficient when comparing alternative planning variants, although the difference in the configuration change is very small. The paper outlines the planning approach for two typical AMHS designs used for interbay transportation in 200mm wafer fabs. The models used are generic and can be adapted easily to different AMHS solutions.