Atomic-resolution imaging with a sub-50-pm electron probe.

  title={Atomic-resolution imaging with a sub-50-pm electron probe.},
  author={Rolf Erni and Marta D. Rossell and C Kisielowski and Ulrich Dahmen},
  journal={Physical review letters},
  volume={102 9},
Using a highly coherent focused electron probe in a fifth-order aberration-corrected transmission electron microscope, we report on resolving a crystal spacing less than 50 pm. Based on the geometrical source size and residual coherent and incoherent axial lens aberrations, an electron probe is calculated, which is theoretically capable of resolving an ideal 47 pm spacing with 29% contrast. Our experimental data show the 47 pm spacing of a Ge 114 crystal imaged with 11%-18% contrast at a 60%-95… CONTINUE READING