Atomic layer deposited aluminum oxide barrier coatings for packaging materials

@inproceedings{Hirvikorpi2010AtomicLD,
  title={Atomic layer deposited aluminum oxide barrier coatings for packaging materials},
  author={Terhi Hirvikorpi and Mika V{\"a}h{\"a}-Nissi and Tuomas Mustonen and Eero I Iiskola and Maarit Karppinen},
  year={2010}
}
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