Atomic force microscopy with a 12-electrode piezoelectric tube scanner.

Abstract

This paper presents a piezoelectric tube scanner with a novel electrode pattern and describes how it may be used for simultaneous sensing and actuation. The electrodes are arranged such that the tube is driven in an antisymmetrical manner, resulting in a collocated system suitable for positive position feedback (PPF). A PPF controller is designed to damp… (More)
DOI: 10.1063/1.3314901

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