Atomic force microscope method for sidewall measurement through carbon nanotube probe deformation correction

@inproceedings{Watanabe2012AtomicFM,
  title={Atomic force microscope method for sidewall measurement through carbon nanotube probe deformation correction},
  author={Masahiro Watanabe and Shuichi Baba and Toshihiko Nakata and Takafumi Morimoto and Satoshi Sekino and Hiroshi Itoh},
  year={2012}
}
To use atomic force microscope to measure narrow vertical features is challenging. Using carbon nanotube (CNT) probes is a possible remedy. However, even with its extremely high stiffness, van der Waals attractive force from steep sidewalls bends CNT probes. This probe deflection effect causes deformation (or "swelling") of the measured profile. When measuring 100-nm-high vertical sidewalls with a 27-nm-diameter and 265-nm-long CNT probe, the probe deflection at the bottom is estimated as large… CONTINUE READING

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