Atomic Layer Deposition and Characterization of Amorphous ErxTi1-xOy Dielectric Ultra-Thin Films

@inproceedings{Xu2012AtomicLD,
  title={Atomic Layer Deposition and Characterization of Amorphous ErxTi1-xOy Dielectric Ultra-Thin Films},
  author={Runshen Xu and Christos G Takoudis},
  year={2012}
}
© The Electrochemical Society, Inc. 2012. All rights reserved. Except as provided under U.S. copyright law, this work may not be reproduced, resold, distributed, or modified without the express permission of The Electrochemical Society (ECS). The archival version of this work was published in ECS Journal of Solid State Science and Technology. 

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