Atmospheric scanning electron microscope system with an open sample chamber: configuration and applications.

@article{Nishiyama2014AtmosphericSE,
  title={Atmospheric scanning electron microscope system with an open sample chamber: configuration and applications.},
  author={Hidetoshi Nishiyama and Mitsuru Koizumi and Koji Ogawa and Shinich Kitamura and Yuji Konyuba and Yoshiyuki Watanabe and Norihiko Ohbayashi and Mitsunori Fukuda and Mitsuo Suga and Chikara Sato},
  journal={Ultramicroscopy},
  year={2014},
  volume={147},
  pages={86-97}
}
An atmospheric scanning electron microscope (ASEM) with an open sample chamber and optical microscope (OM) is described and recent developments are reported. In this ClairScope system, the base of the open sample dish is sealed to the top of the inverted SEM column, allowing the liquid-immersed sample to be observed by OM from above and by SEM from below. The optical axes of the two microscopes are aligned, ensuring that the same sample areas are imaged to realize quasi-simultaneous correlative… CONTINUE READING
8 Citations
0 References
Similar Papers

Citations

Publications citing this paper.

Similar Papers

Loading similar papers…