Assessment of solidly mounted resonators with wide-band asymmetric acoustic reflectors

@article{Olivares2010AssessmentOS,
  title={Assessment of solidly mounted resonators with wide-band asymmetric acoustic reflectors},
  author={Jimena Olivares and E. Wegmann and Marta Clement and Jos{\'e} E. Capilla and Enrique Iborra and J L Sangrador},
  journal={2010 IEEE International Ultrasonics Symposium},
  year={2010},
  pages={1677-1680}
}
We investigate the influence of the structure of acoustic reflectors on the quality factors of solidly mounted bulk acoustic wave resonators made of aluminum nitride. We compare the quality factors of resonators built on conventional λ/4 Bragg reflectors with those of resonators fabricated on asymmetric acoustic reflectors composed of layers of thicknesses different from λ/4. The two kinds of reflectors are made of porous silicon dioxide and iridium as low and high acoustic impedance materials… CONTINUE READING

Citations

Publications citing this paper.
Showing 1-3 of 3 extracted citations

References

Publications referenced by this paper.
Showing 1-10 of 20 references

AlN films sputtered on iridium electrodes for bulk acoustic wave resonators

M. Clement, J. Olivares, +3 authors A. Rastogi
Thin Solid Films, vol. 517, pp. 4673-4678 • 2009
View 1 Excerpt

An improvement of tilted AlN for shear and longitudinal acoustic wave

C. J. Chung, Y. C. Chen, C. C. Cheng, K. S. Kao
Appl. Phys. A, • 2009
View 1 Excerpt

Hueting “ A design procedure for an acoustic mirror providing dual reflection of longitudinal and shear waves in Solidly Mounted BAW Resonators ( SMRs ) ”

E. Iborra A. Devos, J. Olivares, M. Clement, A. Rastogi, N. Rimmer
Proc . of the 2009 IEEE Ultrasonics Symposium • 2009

Sputtered SiO2 as low acoustic impedance material for Bragg mirror fabrication in BAW resonators

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control • 2009
View 1 Excerpt

11E-2 Review and Comparison of Bulk Acoustic Wave FBAR, SMR Technology

2007 IEEE Ultrasonics Symposium Proceedings • 2007
View 1 Excerpt

Application of a Vibrating Membrane Model to BulkAcousticWave Resonators ”

Y. Aota, H. Oguma, S. Kameda, T. Takagi, K. Tsubouchi
Proc . of 2007 IEEE Ultrasonics Symposium • 2007

Similar Papers

Loading similar papers…