Assembly technology across multiple length scales from the micro-scale to the nano-scale

  title={Assembly technology across multiple length scales from the micro-scale to the nano-scale},
  author={G. Skidmore and Matt G. Ellis and Aaron Geisberger and Ken Tsui and Kimberly Tuck and Ritika Saini and Tushar Udeshi and Michael Nolan and R. Stallcup and J. Von Ehr},
  journal={17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest},
Directed microassembly and nanoassembly is performed by using appropriately-sized end-effectors coupled to macro-robotic systems. The larger end-effectors are made via microelectromechanical systems (MEMS) fabrication processes and can handle components ranging from hundreds of microns in size down to ten nanometers. Smaller end-effectors are etched tungsten probes capable of manipulating nano-scale objects. We demonstrate automated and semi-automated microscale assembly while nanoscale… CONTINUE READING


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