Aspect Ratio Dependent Scalloping Attenuation in Drie and an Application to Low-Loss Fiber-Optical Switches

@article{Mita2006AspectRD,
  title={Aspect Ratio Dependent Scalloping Attenuation in Drie and an Application to Low-Loss Fiber-Optical Switches},
  author={Yoshio Mita and Masakazu Sugiyama and Masanori Kubota and F. Marty and Tarik Bourouina and Tomoyuki Shibata},
  journal={19th IEEE International Conference on Micro Electro Mechanical Systems},
  year={2006},
  pages={114-117}
}
The scalloping in the Bosch’s process[ 1] attenuates dependently on the aspect ratio: The scalloping factor, undercut length ludivided by etched depth in each Bosch’s cycle ld, attenuates drastically from the depth where the aspect ratio exceeds 1:1. The phenomenon is not found in the case of large openings at the same depth. Theoretical reason can be attributed to the transportation limit of radicals. This Aspect-Ratio-Dependent-Scalloping-Attenuation (ARDSA) is useful for the applications in… CONTINUE READING

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Patents US 5501893 and EP 625285

  • F. Lärmer
  • 1996
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