Arraying SH0 Lithium Niobate laterally vibrating resonators for mitigation of higher order spurious modes

@article{Song2016ArrayingSL,
  title={Arraying SH0 Lithium Niobate laterally vibrating resonators for mitigation of higher order spurious modes},
  author={Yong-Ha Song and S. Gong},
  journal={2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)},
  year={2016},
  pages={111-114}
}
  • Yong-Ha Song, S. Gong
  • Published 2016
  • Materials Science
  • 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
  • This paper studies the origin of higher-order spurious modes in shear horizontal (SH0) mode Lithium Niobate (LiNbO3) laterally vibrating resonators (LVRs). Near-zero spurious mode response and a high figure of merit (FoM) of 154 have been achieved concurrently by arraying single resonators with only two electrodes at the orientation of 10° to -Y axis in the X-cut plane. The high FoM (154) results from a high electromechanical coupling (kt2) of 14.1% and quality factor (Q) of 1093. In contrast… CONTINUE READING
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