Argon cluster‐ion sputter yield: Molecular dynamics simulations on silicon and equation for estimating total sputter yield

@article{Cumpson2021ArgonCS,
  title={Argon cluster‐ion sputter yield: Molecular dynamics simulations on silicon and equation for estimating total sputter yield},
  author={Peter Cumpson and Mieszko Jaskiewicz and Woo Kyun Kim},
  journal={Surface and Interface Analysis},
  year={2021},
  volume={54},
  pages={341 - 348}
}
Argon Gas Cluster‐Ion Beam sources have become widely‐used on X‐ray photoelectron spectroscopy (XPS) and secondary ion mass spectrometry (SIMS) instruments in recent years, but there is little reference data on sputter yields in the literature as yet. Total sputter yield reference data is needed in order to calibrate the depth scale, of XPS or SIMS depth profiles. We previously published a semi‐empirical ‘Threshold’ equation for estimating cluster total sputter yield from the energy‐per‐atom of… 

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