Area-efficient three-axis micromechanical magnetic sensor


Demonstrated here is a 3-axis Lorentz force magnetic sensor based on a 0.24&#x00D7;0.4 mm<sup>2</sup> MEMS resonator that is the smallest Lorentz force magnetic sensor reported to date. Using a single MEMS structure the sensor can detect magnetic field in two axes. By placing two of these sensors perpendicularly in a single die, three axis field measurement… (More)


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@article{Rouf2012AreaefficientTM, title={Area-efficient three-axis micromechanical magnetic sensor}, author={Vashwar Tajdidur Rouf and Mo Li and David A. Horsley}, journal={2012 IEEE Sensors}, year={2012}, pages={1-4} }