Area-efficient three-axis micromechanical magnetic sensor

Abstract

Demonstrated here is a 3-axis Lorentz force magnetic sensor based on a 0.24&#x00D7;0.4 mm<sup>2</sup> MEMS resonator that is the smallest Lorentz force magnetic sensor reported to date. Using a single MEMS structure the sensor can detect magnetic field in two axes. By placing two of these sensors perpendicularly in a single die, three axis field measurement… (More)

Topics

8 Figures and Tables

Cite this paper

@article{Rouf2012AreaefficientTM, title={Area-efficient three-axis micromechanical magnetic sensor}, author={Vashwar Tajdidur Rouf and Mo Li and David A. Horsley}, journal={2012 IEEE Sensors}, year={2012}, pages={1-4} }