## Modeling of Metal-Fill Parasitic Capacitance and Application to On-Chip Slow-Wave Structures

- Vikas S. Shilimkar, Andreas Weisshaar
- IEEE Transactions on Microwave Theory and…
- 2017

@article{Hirano2013ApproximateEO, title={Approximate evaluation of effective permittivity for metal dummies in a CMOS chip using electrostatic capacitor model}, author={Takuichi Hirano and Kenichi Okada and Jiro Hirokawa and Makto Ando}, journal={2013 7th European Conference on Antennas and Propagation (EuCAP)}, year={2013}, pages={1218-1220} }

- Published 2013 in 2013 7th European Conference on Antennas and…

Approximate evaluation method of effective permittivity for metal dummies in a CMOS chip is proposed. The effective permittivity is calculated using electrostatic capacitor model, which enables very quick estimation of the effective permittivity. Calculated effective permittivity coincides with the one analyzed by electromagnetic eigenmode analysis within… CONTINUE READING

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