Applying Residual Control Charts to Identify the False Alarms in a TFT-LCD Manufacturing Process

Abstract

Statistical Process Control (SPC) is widely applied to monitor and improve highly integrated and automated manufacturing processes. Adopting proper SPC charts and corresponding detection mechanisms is crucial for a TFT-LCD manufacturing process. This study conducts an empirical study of highly complex TFT-LCD manufacturing processes to identify the most… (More)

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