Applications of SOI-based optical MEMS

  title={Applications of SOI-based optical MEMS},
  author={Wilfried Noell and P Clerc and Laurent Dellmann and Benedikt Guldimann and Hans Peter Herzig and Omar and Manzardo and Cornel Marxer and Ken Weible and Rene D{\"a}ndliker and Nico de Rooij}
After micro-electro mechanical systems (MEMS) devices have been well established, components of higher complexity are now developed. Particularly, the combination with optical components has been very successful and have led to optical MEMS. The technology of choice for us is the silicon-on-insulator (SOI) technology, which has also been successfully used by other groups. The applications presented here give an overview over what is possible with this technology. In particular we demonstrate… CONTINUE READING
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