Application of three-dimensional micro-optical components formed by lithography, electroforming, and plastic molding.


Micro-optics is usually associated with planar waveguides or integrated optical circuits. In this case the propagation of light is restricted to one or two dimensions, and the three-dimensional nature of light propagation is disregarded. We present a method of fabricating three-dimensional micro-optical components by the so-called LIGA process, a… (More)
DOI: 10.1364/AO.32.006464


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