Application of the three omega thermal conductivity measurement method to a film on a substrate of finite thickness

@inproceedings{Kim1999ApplicationOT,
  title={Application of the three omega thermal conductivity measurement method to a film on a substrate of finite thickness},
  author={Jung Hun Kim and Albert Edward Feldman and Donald B. Novotny},
  year={1999}
}
The three omega thermal conductivity measurement method is analyzed for the case of one or more thin films on a substrate of finite thickness. The analysis is used to obtain the thermal conductivities of SiO2 films on Si substrates and of a chemical vapor deposition (CVD) diamond plate. For the case of the SiO2 films on a Si, we find an apparent thickness dependence of the thermal conductivity of the SiO2 films. However, the data can also be explained by a thickness-independent thermal… CONTINUE READING

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