Application of the optical beam induced current method to the investigation of n-MOS inverters

@inproceedings{Hempel1992ApplicationOT,
  title={Application of the optical beam induced current method to the investigation of n-MOS inverters},
  author={K. Hempel and Hans Bergner and Andreas Krause and Uwe Stamm},
  year={1992}
}
Abstract The influence of a pulsed test beam on the OBIC-signal for time-resolved OBIC-measurement at a picosecond time scale on n-MOS inverters is considered. A simple approach of the mechanism of optical switching of a blocked n-MOS inverter is presented.