Application of pressure differentiator using isothermal chamber to isolation table

@article{Kato2004ApplicationOP,
  title={Application of pressure differentiator using isothermal chamber to isolation table},
  author={Toyoaki Kato and Kenji Kawashima and Masahiro Yanagisawa and Toshiharu Kagawa},
  journal={SICE 2004 Annual Conference},
  year={2004},
  volume={1},
  pages={845-848 vol. 1}
}
In this paper, the mechanism of a pressure differentiator, applying the principle of an isothermal chamber is explained. The pressure differentiator is then applied to the pressure control of an isolation table, as constituting minor feedback, in order to compensate the non-linearity of a servo valve and realize an isolation table with higher gain and lower… CONTINUE READING