Application of laser scan lithography to fabrication of micro cylindrical parts

Abstract

In this paper we study about the resist films coated on fine cylindrical specimens with diameters of 160-500/spl mu/m, and the specimen being patterned lithographically by scanning a blue laser beam were etched successfully. 

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Cite this paper

@article{Joshima2003ApplicationOL, title={Application of laser scan lithography to fabrication of micro cylindrical parts}, author={Y. Joshima and Tomoyoshi Kokubo and Toshiyuki Horiuchi}, journal={Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference}, year={2003}, pages={150-151} }