Application of adaptive multilevel substructuring technique to model CMOS micromachined thermistor gas sensor, part (I): A feasibility study

  title={Application of adaptive multilevel substructuring technique to model CMOS micromachined thermistor gas sensor, part (I): A feasibility study},
  author={Khaled Sadek and Walied A. Moussa},
  journal={Proceedings International Conference on MEMS, NANO and Smart Systems},
  • K. Sadek, W. Moussa
  • Published 20 July 2003
  • Engineering
  • Proceedings International Conference on MEMS, NANO and Smart Systems
A study has been conducted to investigate the feasibility of using the multilevel substructuring method to perform parametric analysis for MEMS devices. The feasibility study was conducted on a CMOS micromachined thermistor gas sensor. Two multilevel substructuring methods were used, mainly the cumulative and nested superelements methods. The interface problem was found to increase rapidly with the increase in the number of superelements for the cumulative technique. On the other hand, the… 

Figures from this paper

Chemical microsensors for measurement microsystems
  • M. Siegel
  • Chemistry
    IEEE Instrumentation & Measurement Magazine
  • 2004
Microsensors for chemical measurement microsystems exploit a wide variety of chemical and physical transduction principles and a correspondingly wide variety of practical electrical and electronic
for Measurement Microsystems


Micromachined polysilicon power dissipation: simulation and experiment
A novel procedure for the accurate simulation of the thermoelectric effects which determine micromachined structures' behavior is presented, and it is shown that P/sub 1ATM//A/sub VAC/ may not be unity, as had been earlier assumed, but is independent of input current.
Micromachined thermal radiation emitter from a commercial CMOS process
Fabrication of thermally isolated micromechanical structures capable of generating thermal radiation for dynamic thermal scene simulation (DTSS) is described. Complete compatibility with a commercial
Numerical modeling of a micromachined thermal conductivity gas pressure sensor
We have developed a software package that simulates the operation of a silicon micromachined CMOS thermal conductivity gas pressure gauge. The performance of actual devices was compared against the
Thermal response of CMOS‐micromachined thermistor sensors under constant power and constant current excitation
The resistance of a micromachined polysilicon thermistor sensor has been measured under excitation by both a constant current and constant power step. The time‐varying and steady‐state response of
Simulation and physical response of negative temperature coefficient of resistance polysilicon micromachined structures
We present experimental and simulation results for polysilicon micromachined devices with a negative temperature coefficient of resistance. These were fabricated by a CMOS process with a customized
A thermal conductivity microstructural pressure sensor fabricated in standard complementary metal‐oxide semiconductor
We have investigated polysilicon‐based microstructural thermal conductivity pressure sensors fabricated in complementary metal‐oxide‐semiconductor technology and operated as a Pirani gauge. The
Constant power operation of incandescent micromachined polysilicon microresistors for use as vacuum pressure sensors
As a proof of concept study, a micromachined polysilicon resistor was used as a vacuum pressure sensor. The resistor was heated to incandescence and operated with a constant electrical power input. A
Examples of domain decomposition methods to solve non-linear problems sequentially