Application of adaptive multilevel substructuring technique to model CMOS micromachined thermistor gas sensor, part (I): A feasibility study

  title={Application of adaptive multilevel substructuring technique to model CMOS micromachined thermistor gas sensor, part (I): A feasibility study},
  author={Khaled Sadek and Walied A. Moussa},
  journal={Proceedings International Conference on MEMS, NANO and Smart Systems},
  • K. Sadek, W. Moussa
  • Published 20 July 2003
  • Engineering
  • Proceedings International Conference on MEMS, NANO and Smart Systems
A study has been conducted to investigate the feasibility of using the multilevel substructuring method to perform parametric analysis for MEMS devices. The feasibility study was conducted on a CMOS micromachined thermistor gas sensor. Two multilevel substructuring methods were used, mainly the cumulative and nested superelements methods. The interface problem was found to increase rapidly with the increase in the number of superelements for the cumulative technique. On the other hand, the… 

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