Corpus ID: 138320267

Application of Sculptured Thin Film Technology to Metal Oxide Gas Sensors

@inproceedings{Kiether2007ApplicationOS,
  title={Application of Sculptured Thin Film Technology to Metal Oxide Gas Sensors},
  author={W. Kiether},
  year={2007}
}
KIETHER, WILLIAM JAY. Application of Sculptured Thin Film Technology to Metal Oxide Gas Sensors. (Under the direction of Dr. H. Troy Nagle.) The main goal of this research has been the application of glancing angle deposition (GLAD) techniques to create highly porous sculptured thin films (STF) structures for use as gas sensors. The glancing angle technique utilizes physical vapor depositions at highly oblique (>70o) angles of incidence to form porous film structures. Process conditions… Expand

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