Application of Diamond-Like Nanocomposite Tribological Coatings on LIGA Microsystem Parts

  title={Application of Diamond-Like Nanocomposite Tribological Coatings on LIGA Microsystem Parts},
  author={Suchitra Gupta Prasad and Taryn E. Scharf and Paul Gabriel Kotula and Jane Jelimo Michael and Todd Christenson},
  journal={Journal of Microelectromechanical Systems},
The major focus of this study was to examine the feasibility of applying diamond-like nanocomposite (DLN) coatings on the sidewalls of Ni alloy parts fabricated using lithographie, galvanoformung and abformung (LIGA: a German acronym that means lithography, electroforming, and molding) for friction and wear control. Planar test coupons were employed to understand the friction mechanisms in regimes relevant to LIGA microsytems. Friction tests were conducted on planar test coupons as well as… CONTINUE READING


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