Application of Atmospheric Plasma Abatement System for Exhausted Gas from MEMS Etching Process

Abstract

For the reduction of global warming potential (GWP) gases such as PFCs from semiconductor manufacturing process, we have developed an atmospheric plasma abatement system that has high decomposition efficiency. We have applied the plasma abatement system for decomposition of PFCs in exhausted gas from MEMS (micro electro mechanical system) etching process… (More)

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