Apparatus for manipulation of an optical element

  title={Apparatus for manipulation of an optical element},
  author={요하네스 리페르트 and 미햐엘 뮐바이어},
The present invention relates to a device for operating the optical element 7 up to six degrees of freedom for the structure (8)) via at least three actuators (9). The actuator device (9) each having at least two force-controlled actuators to be effective oil along the first degree of freedom, respectively, the connection point 11 of the actuator device 9 acts directly on the optical element (7). Actuators, freedom, optical elements, oil effect, combining elements