Anti-stiction coating of PDMS moulds for rapid microchannel fabrication by double replica moulding

@inproceedings{Zhuang2011AntistictionCO,
  title={Anti-stiction coating of PDMS moulds for rapid microchannel fabrication by double replica moulding},
  author={Guisheng Zhuang and J{\"o}rg P. Kutter},
  year={2011}
}
In this paper, we report a simple and precise method to rapidly replicate master structures for fast microchannel fabrication by double replica moulding of polydimethylsiloxane (PDMS). A PDMS mould was surface-treated by vapour phase deposition of 1H,1H,2H,2Hperfluorodecyltrichlorosilane (FDTS), which resulted in an anti-stiction layer for the improved… CONTINUE READING