Anodizing process of Al films on Si substrates for forming alumina templates with short-distance ordered 25 nm nanopores

Porous alumina templates with short-distance ordered 25 nm nanopores were fabricated by controlling anodizing progress of Al films on Si substrates in sulfuric acid solution. The ordering of nanopore arrangement with a hexagonal symmetry was found to be closely related to thickness of the deposited Al film, growth temperature, applied voltage, and solution… CONTINUE READING