Annealing nano-to-micro contacts for improved contact resistance

Abstract

Nano-to-micro electrical contact resistance between carbon nanotubes (CNTs) and larger-scale silicon systems are investigated using both low-and high-power annealing techniques. Carbon nanotubes locally synthesized and suspended between two silicon microbridges are used as the test platform. The annealing technique involves Joule heating of either the CNT… (More)
DOI: 10.1109/NEMS.2010.5592493

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