Anisotropy Effects in Electrochemical Etching of p+-Si

@inproceedings{Astrova2012AnisotropyEI,
  title={Anisotropy Effects in Electrochemical Etching of p+-Si},
  author={Ekaterina V. Astrova and V. P. Ulin and Yu. A. Zharova and I. L. Shul’pina and A. V. Nashchekin},
  year={2012}
}
  • Ekaterina V. Astrova, V. P. Ulin, +2 authors A. V. Nashchekin
  • Published 2012
  • DOI:10.1149/2.095203jes

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