Analytical modeling of micromachined resonator sensor activated by cw laser irradiation

@article{Hane1997AnalyticalMO,
  title={Analytical modeling of micromachined resonator sensor activated by cw laser irradiation},
  author={Kazuhiro Hane},
  journal={Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)},
  year={1997},
  volume={1},
  pages={105-108 vol.1}
}
Analytical modeling of micromachined mechanical resonator sensor self-excited by cw laser irradiation is presented. The optical feedback through the photothermal effect in the interference fringe generates the self-excited vibration of the micromachined beams. The optical interference, thermal diffusion in the resonator and mechanical dynamics of the resonator are combined to maintain the oscillation. From the analysis, the following phenomena of the self-excited vibration have been explained… CONTINUE READING

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