Analytical Solution of the Continuous Cellular Automaton for Anisotropic Etching

Abstract

The fabrication of micro- and nanoelectromechanical systems (MEMS/NEMS) is based on a wide variety of growth and etching technologies sequentially applied throughout process flows which may involve a dozen or more steps, their realistic simulation having become an essential part of the overall design. By focusing in the simulation of anisotropic etching as… (More)

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